Polishing apparatus having interlock function,申请号EP20020004882-传众专利搜索

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发明名称	Polishing apparatus having interlock function
摘要
申请公布号	EP1213094(A9)	申请公布日期	2002.08.07
申请号	EP20020004882	申请日期	1997.05.28
申请人	EBARA CORPORATION	发明人	WATANABE, KATSUHIDE
分类号	B24B37/04;B24B49/16;G05B19/4063;G05B19/416;(IPC1-7):B24B37/04	主分类号	B24B37/04
代理机构		代理人
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