SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of maintaining opening and closing conditions of a block member (shutter member). SOLUTION: While a rod 321 of an air cylinder 32 is buried in a main body 322, a shutter plate 39 adheres closely to a seal member 12 to block a substrate passing port 11. When the rod 321 of the air cylinder 32 is made to advance from the main body 322 and an end part 351 of a lever 35 is pushed up, an L-shaped member 38 rotates counterclockwise in the drawing 2, and the shutter plate 39 leaves the substrate passing port 11 to open the substrate passing port 11. A metallic balancer 4 for generating a moment for maintaining opening and closing conditions of the substrate passing port 11 in the L-shaped member 38 is embedded in the L-shaped member 38.