| 摘要 |
<p>PURPOSE:To transfer a wafer safely without the possibility of damage by conducting the delivery of the wafer between a wafer carrier and a fork and its transfer between the wafer carrier and a reaction chamber by the cooperative operation of a carrier lifting mechanism and a fork moving mechanism. CONSTITUTION:Wafers 7 are delivered between a wafer carrier 6 and a fork 9 in a soft handling system in a wafer transfer process. Since the wafers 7 are scooped up from the wafer carrier 6 as they are left as they are positioned at a horizontal position and carried onto the fork 9, even the wafers having a large diameter can be handled without the possibility of damage. The fork 9 is turned and operated centering around a driving shaft 11 by a rotational drive mechanism 25 in a reaction chamber in response to processing processes, thus changing the directions of the wafers 7 carried onto the fork up to an approximately vertical angle from a horizontal wafer position.</p> |
