发明名称 PLASMA X-RAY GENERATION DEVICE
摘要 PURPOSE:To reject unnecessary current in case of a pinch and stabilize highly strengthened X-ray output by applying high frequency-electric field in the form of a pulse just before the main discharging and forming a preparatory discharging part in an irregular structure to form initial plasma with good repeatability. CONSTITUTION:A discharging chamber 10 is evacuated with a vacuum pump through an outlet 11 and filled with a gas which is to be changed to plasma through an inlet 12. When high frequency-electric field is applied to an electrode 3 in the form of a pulse by a timing circuit 9, a gas existing in a preparatory discharging-space 16 is electrically dissociated and changed to plasma. A current flows in a main discharging current passage 17 when high frequency-electric field is cut off and voltages are applied to electrodes 1 and 2. The plasma formed in the current passage 17 runs toward the open end of a space existing between the electrodes 1 and 2, then pinches by current-magnetic field to form plasma with high temperature and density. When the plasma pinches, X-ray is generated and radiated through a window 15. The surface of an insulator surrounding the space 16 is made irregular so that no current flows except pinched plasma.
申请公布号 JPS63211598(A) 申请公布日期 1988.09.02
申请号 JP19870040245 申请日期 1987.02.25
申请人 HITACHI LTD 发明人 OCHIAI ISAO;KATO YASUO
分类号 H05G2/00;H01J35/22;H01L21/027;H01L21/30;H05G1/00 主分类号 H05G2/00
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