摘要 |
PURPOSE:To reject unnecessary current in case of a pinch and stabilize highly strengthened X-ray output by applying high frequency-electric field in the form of a pulse just before the main discharging and forming a preparatory discharging part in an irregular structure to form initial plasma with good repeatability. CONSTITUTION:A discharging chamber 10 is evacuated with a vacuum pump through an outlet 11 and filled with a gas which is to be changed to plasma through an inlet 12. When high frequency-electric field is applied to an electrode 3 in the form of a pulse by a timing circuit 9, a gas existing in a preparatory discharging-space 16 is electrically dissociated and changed to plasma. A current flows in a main discharging current passage 17 when high frequency-electric field is cut off and voltages are applied to electrodes 1 and 2. The plasma formed in the current passage 17 runs toward the open end of a space existing between the electrodes 1 and 2, then pinches by current-magnetic field to form plasma with high temperature and density. When the plasma pinches, X-ray is generated and radiated through a window 15. The surface of an insulator surrounding the space 16 is made irregular so that no current flows except pinched plasma. |