| 摘要 |
A differential spiral magnetic field sensing device is constructed such that two soft magnetic film cores are arranged parallel to each other, each soft magnetic film core is divided into several parts in a detection axial direction to reduce anti-magnetic field components, the differential excitation coil, the magnetic flux variation detecting coil and the zero magnetic field detecting coil are laminated and wound turn by turn around the soft magnetic film cores, and there is no induced voltage waveform to the magnetic flux variation detecting coil without external magnetic field. Also, in order to minimize the leaked magnetic field components of the soft magnetic film cores, the soft magnetic film cores are sandwiched to form closed magnetic paths, and the differential excitation coil, the magnetic flux variation detecting coil and the zero magnetic field detecting coil are spirally laminated around the sandwiched soft magnetic film cores. Further, in the magnetic field detection module, a differential spiral magnetic field sensing device and a signal process for driving the same are integrated on the substrate of a monolithic semiconductor device.
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