| 发明名称 |
FINE STRUCTURE, AND MANUFACTURING METHOD THEREFOR |
| 摘要 |
PROBLEM TO BE SOLVED: To provide fine structure having a space between two members comprising metal. SOLUTION: Ozone is brought into contact with a sacrifice film 117 via plural opening parts of an upper electrode 110a by heating to 250-300 deg.C under an ozone atmosphere, and the sacrifice film 117 is removed thereby.
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| 申请公布号 |
JP2002219695(A) |
申请公布日期 |
2002.08.06 |
| 申请号 |
JP20010014331 |
申请日期 |
2001.01.23 |
| 申请人 |
NIPPON TELEGR & TELEPH CORP <NTT> |
发明人 |
MACHIDA KATSUYUKI;ISHII HITOSHI;SATO NORIO;KURAKI OKU |
| 分类号 |
B81B3/00;B81C1/00;C23F1/00;(IPC1-7):B81B3/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
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