STRUCTURE INCLUDING MICROVALVE

摘要

PROBLEM TO BE SOLVED: To obtain a structure including a microvalve for preventing backflow of fluid in a fluid channel. SOLUTION: The structure 40 comprises a first substrate 42 and a second substrate 44 defining a fluid channel 48. A microvalve 54 is formed on the first or second substrate. The microvalve 54 comprises a flap 68 being bent to prevent fluid from flowing into a part 50 of the channel 48 due to a pressure being applied to the flap 68 by vapor above the fluid in the channel. The microvalve 54 can be formed in the ink jet print head 40. The microvalve 54 can be formed in a semiconductor material by a simplified method using a small number of masking levels.