SEMICONDUCTOR MICRO ACTUATOR

摘要

PROBLEM TO BE SOLVED: To make an abutting face parallel to a face abutting to the abutting face in a moving element when the moving element is displaced to be brought into contact with the abutting face, and make electric power consumption low. SOLUTION: This actuator is provided with the moving element 2 comprising silicon as a valve element for opening and closing a valve port 11 formed in a base 10, and the moving element 2 is displaced to open and close the valve port 11. A valve seat 12 is formed in an opposed face opposed to the moving element 2 in a peripheral part of the valve port 11, and a tip face 12a of the valve seat 12 serves as the abutting face for regulating a moving range of the moving element 2 in the width direction of a support part 1. The moving element 2 is coupled to the support part 1 comprising a semiconductor joined to the base 10 via a flexible member comprising an arm piece 3 and a connection piece 5. A deformation part 4b deformed elastically to eliminate an inclination of the moving element 2 with respect to the abutting face when the moving element 2 abuts to the abutting face is provided in the arm piece 3.