发明名称
摘要 PURPOSE:To determine the area of inspection of an object of inspection stuck on a glass plate. CONSTITUTION:An object W of inspection is illuminated by an illuminating part 4, an image of a part of the object W of inspection is picked up by an image pickup part 5 and image data are inputted to an image processing part 6. The image processing part 6 determines an average density value of the image data near the center of the object W of inspection which are inputted, and sets a reference density area value of some range. Moreover, a part of the image data on a side of the object W of inspection is divided into strip- shaped areas and the average density value of the strip-shaped areas is determined. This average density value is compared with the reference density area value and a plurality of edge points of the side are determined. Subsequently, regression lines are determined from the edge points in a plurality and an area surrounded by the regression lines is recognized as the area W of inspection.
申请公布号 JP3311135(B2) 申请公布日期 2002.08.05
申请号 JP19940052208 申请日期 1994.03.23
申请人 发明人
分类号 G01N21/88;G01M11/00;G01N21/93;G01N21/956;G01N21/958;G06T1/00;G06T7/00;G06T7/60;G06T9/20;H01L21/66 主分类号 G01N21/88
代理机构 代理人
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