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发明名称
MANUFACTURE OF SAMPLE FOR MEASURING IMPURITY CONCENTRATION
摘要
申请公布号
JPH01291441(A)
申请公布日期
1989.11.24
申请号
JP19880122303
申请日期
1988.05.19
申请人
SANYO ELECTRIC CO LTD
发明人
TOUNO HIROSHIGE
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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