METHOD AND APPARATUS FOR MANUFACTURING SILICON BASED THIN FILM, AND PHOTOVOLTAIC DEVICE AND METHOD FOR MANUFACTURING IT

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing a silicon-based thin film having a good priority orientation and grown columnar crystal, and a photovoltaic device and a method for manufacturing it. SOLUTION: A substrate is heated to a predetermined temperature in a reaction chamber, silicon-containing gas and hydrogen gas are supplied between the substrate and a discharge electrode, a high frequency electric power of a source frequency of 100 MHz to 300 MHz is applied between the discharge electrode and the substrate to produce a discharge plasma, and a thin-film- crystal-like silicon thin film is stack-formed on the substrate.