SOFT MAGNETIC FILM, METHOD OF MANUFACTURING THE SAME THIN FILM MAGNETIC HEAD USING THE SAME, AND METHOD OF MANUFACTURING THE THIN FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To provide a soft magnetic film which has a saturation magnetic flux density Bs higher than that Bs of an NiFe alloy film by properly adjusting the compositional ratio of a CoFeαalloy film being used for the soft magnetic film and moreover which is excellent also in an erosion resistance, and to provide a thin film magnetic head using this soft magnetic film, a method of manufacturing the soft magnetic film, and a method of manufacturing the thin film magnetic head. SOLUTION: A lower magnetic pole layer 19 and/or an upper magnetic pole layer 21 are/is formed of a CoXFeYαZ alloy film to satisfy the relation between the compositional ratio X of Co = higher than 8 mass % to lower than 48 mass %, the compositional ratio Y of Fe = higher than 50 mass % to lower than 90 mass % and the compositional ratio Z of an elementα(Provided that the elementαis one side or both of Ni and Cr) = higher than 2 mass % to lower than 20 mass % and the compositional ratios X+Y+Z=100 mass %. Hereby, the saturation magnetic flux density of the alloy film can be set in a density of 2.0 T or higher and a thin film magnetic head excellent in an increase in a recording density can be manufactured using this alloy film.