| 摘要 |
PROBLEM TO BE SOLVED: To provide an analytical electron microscope capable of increasing inclination of a sample, and also capable of preventing scattering X-rays from occurring from a cap member. SOLUTION: The analytical electron microscope comprises an objective lens system provided with an upper-side magnetic pole (13) and a lower-side magnetic pole (14), of truncated-cone shape, comprising magnetic pole holes for electron beams (1) generated by an electron beam source to pass, a lens barrel which, comprising a sample chamber in which a sample is placed, is provided between the upper-side magnetic pole (13) and the lower-side magnetic pole (14), and an X-ray detector (20) which is provided on the side surface of the lens barrel, protruding into the sample chamber from the side surface of the lens barrel, and detects the X-ray occurring from the sample. Cap members (18 and 19) including cylindrical members (18 and 19) are so provided as to protrude from the top surface part of the magnetic pole into the magnetic pole hole of at least one of the magnetic poles of the upper-side magnetic pole (13) and the lower-side magnetic pole (14) of the objective lens system.
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