| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper for a magneto- optical recording medium in which the width of a preformat groove is narrow and the section of the groove is rectangle. SOLUTION: A photoresist 2, an amorphous Si layer 3 and a photoresist 4 are formed in order on a glassy substrate 1, and a pbotoresist pattern 5 is formed by the exposure and the development of the photoresist 4. Then, a groove pattern 6 is formed by etching the amorphous Si layer 3 till it reaches the photoresist 2 by means of a reactive etching method, the photoresist pattern 5 is removed by etching the photoresist 2 till it reaches the glassy substrate 1 by means of a plasma etching method, a groove pattern 7 which is incorporated into the groove pattern 6 is formed, and then nickel electroforming on the amorphous Si layer 3 and in the groove pattern 7 is carried out by an electroforming method. |
