| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a capacitor having a small amount of change in capacitance for the capacitor manufactured by the MEMS technique. SOLUTION: This microcomponent has a capacitive component. The capacitive component is composed by the continuous coupling of at least two capacitor elements (C1, C2, C3, and C4) that are successively connected. There are first and second plates (10) and (12) in each component. The first plate (10) is fixed to the other of the microcomponents. The second plate (12) includes a portion (19) that can deviate to the first fixed plate (10) by the effect of a control signal so that the value of the capacitance of the capacitor element C1 is changed. The control signal to the plurality of capacitor elements should be independently generated so that the entire capacitance of the capacitor is changed by independent change in the capacitance of each capacitor element.</p> |
