| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage system in which deformation of a stage caused by gas acting through gas bearings can be suppressed, and an aligner in which highly accurate alignment can be effected using that stage system. SOLUTION: A reticle stage 2 comprises a fine motion stage 18, a rough motion stage 16 having an upper surface 16a facing the lower surface 18a of the fine motion stage 18, a plurality of air bearings 60 disposed at a plurality of positions on the lower surface 18a and having a part 62 for blowing gas toward the upper surface 16a, and vacuum sections 66 disposed between respective air bearings 60 and discharging gas in the space between the lower surface 18a and the upper surface 16a.</p> |
