SCRIBING METHOD AND SCRIBING TOOL

摘要

PROBLEM TO BE SOLVED: To provide a scribing method and a scribing tool which can control the shape of a scribe line. SOLUTION: This scribing method comprises a process in which a scribe line is formed by moving a scribing needle on a semiconductor substrate after bringing the scribing needle into contact with the surface of the semiconductor substrate, and the scribing needle is pulled up from the surface of the substrate after the scribe line is formed. As the stylus force of the scribing needle pressed to the surface of the semiconductor substrate is controlled, scribing lines are formed.