EQUIPMENT AND METHOD OF PLASMA TREATMENT

摘要

PROBLEM TO BE SOLVED: To obtain plasma distribution suitable for treatment even when a plasma forming condition is changed. SOLUTION: The equipment provides a mounting stand 22 for placing a body to be treated 21, a treatment container 11 having an opening and containing the mounting stand 22 therein, an antenna 30 for supplying electromagnetic field F in a treatment container 11 through a dielectric member 13 placed out of the treatment container 11 facing to the dielectric member 13, and a means for regulating an antenna position for changing the distance L between the antenna 30 and the dielectric member 13.