| 摘要 |
<p>PROBLEM TO BE SOLVED: To overcome an electrical, optical problem caused by surface surges or scars on a glass substrate, by chemically and mechanically polishing an insulation film that is arranged so as to contact with the glass substrate and have almost the same refraction factor as that of the glass substrate. SOLUTION: By polishing the insulation film that is arranged so as to contact with the glass substrate and have almost the same refraction factor with that of the glass substrate, surges or scars on a glass substrate can be reduced. Hereby the occurrence of an interference band can be controlled. Additionally, if TFTs are formed on the insulation film and the interlayer film of the TFTs is polished, the fluctuation of the interlayer film thickness caused by the surge of the glass substrate can be suppressed.</p> |
