SYSTEM AND METHOD FOR IRRADIATING ELECTRON BEAM

摘要

PROBLEM TO BE SOLVED: To obtain an electron beam irradiation system for machining a work by irradiating it with an electron beam in which the accuracy of irradiating position is enhanced. SOLUTION: Depending on the outputs from a plurality of magnetic detectors 41-46 disposed in the vicinity of an electron beam generator 25 or in a vacuum tank 10, an electron beam deflection electrode 31 is driven to deflect an electron beam in the direction for canceling deflection of electron beam due to variation of magnetic field thus correcting positional shift of an electron beam spot focused on an original board 21 due to variation of magnetic field.