| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable a board to be positioned corresponding to an increase in size, decrease in thickness, miniaturization of a process, high definitization and reduction in dusts. SOLUTION: A method for positioning the board in a load locking chamber 2 comprises steps for moving the board 4 to be transferred from an exterior 3 or a vacuum treating chamber 1 in two X- and Y-axis directions in the load locking chamber 2 for transferring the board 4 by holding a vacuum state of the vacuum treating chamber 1 between the chamber 1 and the exterior 3, supporting from the lower part of the board by a support means 11 capable of vertically rotating around a Z-axis, image-recognizing the position and the inclination of the supported board 4 by recognition cameras 12 and 13, and positioning the board 4 at a prescribed position by at least one of the movement in the X- and Y-axis direction of the means 11 and the rotation around the Z-axis when there is a positional deviation or an inclination.</p> |
