| 摘要 |
PROBLEM TO BE SOLVED: To rapidly and accurately switch lots in a semiconductor manufacturing apparatus and perform interrupt processing even when an urgent lot occurs. SOLUTION: This semiconductor manufacturing apparatus has a queue table for reserving a plurality of jobs in an execution order. Each time when lot processing by a job reserved in the queue table is completed, whether lot processing by the next job reserved in the queue table is stopped is determined before the lot processing by the next job is started. When stop is determined, the lot processing by the next job is stopped.
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