MANUFACTURE OF SEMICONDUCTOR WAFER FOR SOLAR BATTERY AND SEMICONDUCTOR WAFER FOR SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing semiconductor wafer for solar battery for effectively texturing the surface of a polycrystalline and a single- crystal silicon wafer using the simplified chemical etching method, in order to improve optical absorption coefficient at a low price. SOLUTION: The method of manufacturing semiconductor wafer for solar battery comprises a first step of forming a protector 3 at the surface of semiconductor wafer 1 in an island shape of the random distribution with either of the spray method and screen printing method, a second process to form a groove of U-shape, by soaking the semiconductor wafer 1 into an isotropic etching solution 5 to etch an unformed region of the protector 3 and a third process to remove the protector 3.