| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an information providing unit which manages main information required for a semiconductor production system to execute a specified process. SOLUTION: The semiconductor production system 2 can perform a specified semiconductor process to a substrate. The information providing unit 1 manages process recipe information required for the semiconductor production system 2 to execute a specified process. The information providing unit 1 comprises an interface section 50, a storage means 52, and a providing means 54. The interface section 50 communicates with the semiconductor production system 2 by a signal. The storage means 52 stores process recipe information. The providing means 54 operates to read out the process recipe information from the storage means 52 and provide it to the interface section 50. An access signal is provided from the interface section 50 in response to a signal for requesting access to the storage means 52. Consequently, a process recipe is provided from the information providing unit 1 to the semiconductor production system 2.</p> |
