发明名称 SURFACE-EMITTING SEMICONDUCTOR LASER AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a surface-emitting semiconductor laser which has high efficiency and low heat resistance, and is suitable for the oscillation of lasers with wavelengths >=1μm. SOLUTION: On the surface of a substrate made of a 1st semiconductor with a 1st grating constant, a lower multilayered mirror is arranged. The lower multilayered mirror has a laminate structure wherein a 1st layer formed by oxidizing a 2nd semiconductor and a 2nd layer made of a 3rd semiconductor are laminated by turns. On the loser multilayered mirror, a strain-reducing layer 3 is arranged which is made of a 4th semiconductor having a 2nd grating constant different from the 1st grating constant. On the strain reducing layer 3, an active layer 12 is arranged. The active layer 12 includes a light emitting area made of a 5th semiconductor having a 3rd grating constant different from the 1st and 2nd grating constants. On the active layer 12, an upper multilayered mirror is arranged.
申请公布号 JP2002217492(A) 申请公布日期 2002.08.02
申请号 JP20010009003 申请日期 2001.01.17
申请人 FUJITSU LTD 发明人 OTSUBO KOJI
分类号 H01S5/024;H01S5/183;H01S5/32;(IPC1-7):H01S5/183 主分类号 H01S5/024
代理机构 代理人
主权项
地址