发明名称 MANUFACTURING METHOD FOR PIEZOELECTRIC PART AND CUTTING APPARATUS USED THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a cutting apparatus and a manufacturing method for cutting an element without damaging the element, in which a piezoelectric part with a protective film formed on the surface of the element and on the surface of the electrode is cut. SOLUTION: A piezoelectric board 4 having a protective film, which is formed after an electrode is formed, is cut with a cutting blade 6, while an alkaline solution with an added soluble material is fed to the cutting part to cool and neutralize the charges.
申请公布号 JP2002217664(A) 申请公布日期 2002.08.02
申请号 JP20010011260 申请日期 2001.01.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TANABE TAKASHI
分类号 H03H3/08;(IPC1-7):H03H3/08 主分类号 H03H3/08
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