SEMICONDUCTOR MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor measuring instrument provided with such a cleaning mechanism that can remove foreign matters from the needle point of a probe needle while suppressing the wear and tear of the needle. SOLUTION: This semiconductor measuring instrument used for performing electrical characteristic tests on a semiconductor wafer by using a probe card 2 is provided with the cleaning mechanism 1 which removes foreign matters from the needle point of the needle of the probe card 2 by making an electric current flow to the needle.