发明名称 Formation method for semiconductor layer
摘要 After a Group III-V compound semiconductor layer, to which a p-type dopant has been introduced, has been formed over a substrate, the compound semiconductor layer is annealed. In the stage of heating the compound semiconductor layer, atoms, deactivating the p-type dopant, are eliminated from the compound semiconductor layer by creating a temperature gradient in the compound semiconductor layer.
申请公布号 US2002102761(A1) 申请公布日期 2002.08.01
申请号 US20010837554 申请日期 2001.04.19
申请人 HASEGAWA YOSHIAKI;TSUJIMURA AYUMU;KIDOGUCHI ISAO;BAN YUZABURO 发明人 HASEGAWA YOSHIAKI;TSUJIMURA AYUMU;KIDOGUCHI ISAO;BAN YUZABURO
分类号 C30B29/64;H01L21/324;(IPC1-7):H01L21/00 主分类号 C30B29/64
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