发明名称 FERROELECTRIC CAPACITOR, METHOD FOR THE PRODUCTION AND USE THEREOF
摘要 The invention relates to a capacitor (1), comprising a multi-layered structure with at least two layers of electrodes (3, 4) and one ferroelectric layer (2) with ferroelectric material arranged between the layers of said electrodes. At least one of the electrode layers (4) is arranged on at least one of the insulating layers (5) made of electric insulating material which is different from ferroelectric material. The capacitor is characterised in that the electrode layer arranged on the insulating layer is disposed in a cavity (6) of the electrode layer. An electrode layer is therefore situated between the ferroelectric layer of the capacitor and an insulating layer. The electrode layer is buried. The result thereof is a simple and safe electric insulation of the electrode layers in relation to each other. At the same time, the capacitor can be produced in a more simplified manner, since the insulation material does not need to be arranged on a lateral surface of the capacitor for electrical insulation of the electrode layers. The capacitor is used as a detection element (30) in an array of detectors (31) for detecting infra red radiation (32).
申请公布号 WO02059922(A2) 申请公布日期 2002.08.01
申请号 WO2002DE00178 申请日期 2002.01.21
申请人 SIEMENS AKTIENGESELLSCHAFT;PRIMIG, ROBERT;SCHREITER, MATTHIAS;PITZER, DANA;BRUCHHAUS, RAINER 发明人 PRIMIG, ROBERT;SCHREITER, MATTHIAS;PITZER, DANA;BRUCHHAUS, RAINER
分类号 H01L21/02 主分类号 H01L21/02
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