发明名称 SYSTEMS AND METHODS FOR APPLICATION OF ATMOSPHERIC PLASMA SURFACE TREATMENT TO VARIOUS ELECTRONIC COMPONENT PACKAGING AND ASSEMBLY METHODS
摘要 This invention is related to a method for effecting metallic bond region modification in electronic components comprising metallic bond regions, the method comprising the steps of: transporting an electronic component having at least one metallic bond region through a primary gas atmosphere comprising unstable or excited gaseous species, the gaseous species being substantially devoid of any electrical charges, the primary gas atmosphere having a pressure ranging from about 0.5 x 10<5> Pa to about 3.0 x 10<5> Pa, thereby forming a treated electronic component.
申请公布号 WO0141963(A9) 申请公布日期 2002.08.01
申请号 WO2000US42454 申请日期 2000.12.01
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET, L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;SINDZINGRE, THIERRY;UNER, JASON, R. 发明人 SINDZINGRE, THIERRY;UNER, JASON, R.
分类号 H01L21/00;H01L21/60;H01L21/768 主分类号 H01L21/00
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