| 摘要 |
<p>Apparatus and concomitant method for performing priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing system (cluster tool) having at least one metrology chamber. The sequencer assigns priority values to the chambers and stations in a wafer processing system (i.e., a cluster tool plus a factory interface), then moves wafers from chamber to chamber in accordance with the assigned priorities. The sequencer also selects particular wafers for placement into at least one metrology chamber or station.</p> |
