发明名称 |
HEIGHT SCANNING INTERFEROMETRY METHOD AND APPARATUS INCLUDING PHASE GAP ANALYSIS |
摘要 |
An analysis method for analyzing height-scanning interferometry data from a test surface, the method including: calculating a coherence profile and a phase profile for the test surface based on the data; calculating an experimental phase gap map based on a difference between the phase profile and the coherence profile; filtering the experimental phase gap map to remove noise; and using the filtered phase gap map to improve an estimate for a height profile of the test surface. |
申请公布号 |
WO0240938(A3) |
申请公布日期 |
2002.08.01 |
申请号 |
WO2001US51152 |
申请日期 |
2001.11.02 |
申请人 |
ZYGO CORPORATION;DE GROOT, PETER;KRAMER, JAMES, W. |
发明人 |
DE GROOT, PETER;KRAMER, JAMES, W. |
分类号 |
G01B9/02;G01B11/06;G01B11/24;G01B11/30 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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