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发明名称
Filmträger und diesen verwendende Halbleiteranordnung
摘要
申请公布号
DE69616773(T2)
申请公布日期
2002.08.01
申请号
DE1996616773T
申请日期
1996.08.07
申请人
NITTO DENKO CORP., IBARAKI
发明人
TAKAYAMA, YOSHINARI;OUCHI, KAZUO;HINO, ATSUSHI
分类号
H01L23/498;(IPC1-7):H01L23/498
主分类号
H01L23/498
代理机构
代理人
主权项
地址
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