NUMERICAL APERTURE INCREASING LENS (NAIL) TECHNIQUES FOR HIGH-RESOLUTION SUB-SURFACE IMAGING
摘要
A viewing enhancement lens (18 - NAIL) which functions to increase the numerical aperture or light gathering or focusing power of viewing optics such as a microscope (26) used to view structure within a substrate such as a semiconductor wafer or chip or of imaging optics such as media recorders. The result is to increase the resolution of the system by a factor of between n, and n<2>, where n is the index of refraction of the lens substrate.
申请公布号
WO0079313(A9)
申请公布日期
2002.08.01
申请号
WO2000US40253
申请日期
2000.06.20
申请人
TRUSTEES OF BOSTON UNIVERSITY;IPPOLITO, STEPHEN, B.;UNLU, M., SELIM;GOLDBERG, BENNETT, B.
发明人
IPPOLITO, STEPHEN, B.;UNLU, M., SELIM;GOLDBERG, BENNETT, B.