发明名称 Semiconductor device and manufacturing method of the same
摘要 Disclosed is a semiconductor device, comprising a first wiring structure formed on a semiconductor substrate and including a first plug and a first wiring formed on the first plug, and a second wiring structure formed on the semiconductor substrate belonging to the wiring layer equal to the first wiring structure and including a second plug and a second wiring formed on the second plug, wherein the upper surface of the first wiring is positioned higher than the upper surface of the second wiring, and the lower surface of the first wiring is positioned flush with or lower than the upper surface of the second wiring. The present invention also provides a method of manufacturing the particular semiconductor device.
申请公布号 US2002102843(A1) 申请公布日期 2002.08.01
申请号 US20020086556 申请日期 2002.03.04
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SETA SHOJI;SEKINE MAKOTO;NAKAMURA NAOFUMI
分类号 H01L21/311;H01L21/768;(IPC1-7):H01L21/44 主分类号 H01L21/311
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