| 摘要 |
Turbomolecular vacuum pump (1) with an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet, whereby the rotor blades (6) have front sides (11) and rear sides (12) in relation to the direction of rotation thereof. According to the invention, the pumping properties of the pump my be improved, whereby at least a part of the rotor vanes (6) comprises a rear side (12), convex on the suction-side and concave on the pressure side, or that at least part of the rotor vane (6) comprises a front side (11), which is concave on the suction side and convex on the pressure side.
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