Making extended and rounded recess in component for e.g. micro-fluidic flow, employs anisotropic, then isotropic etching through groove-forming mask

摘要

To make a groove- forming recess (3) in the component (1) a mask (6) with opening (7) of appropriate length and width is deposited onto the component (1). Anisotropic, then isotropic etching then take place. An independent claim is included for the component so produced.