| 摘要 |
To carry out measurements in the vacuum, for example for quality control in the production of semiconductors, conventional stand alone measuring machines are installed. They are very cost, space and time intensive. To enable a process oriented measurement under optimal conditions, a device with a two part case (20, 21) is proposed that can be moved in a vacuum chamber, whereby one part of the case (21) projects into the vacuum chamber and the other part of the case (20) is located outside the vacuum chamber. The case (20, 21) can receive a measurement system (34). In addition, an adjusting device (25), engaging with the case (20, 21), and a counterpull device (39), engaging with the second part of the case (20), are provided.
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