发明名称 OXIDIZED FILM STRUCTURE AND METHOD OF MAKING EPITAXIAL METAL OXIDE STRUCTURE
摘要 <p>A stable oxidized structure and an improved method of making such a structure, including an improved method of making an interfacial template for growing a crystalline metal oxide structure, are disclosed. The improved method comprises the steps of providing a substrate with a clean surface and depositing a metal on the surface at a high temperature under a vacuum to form a metal-substrate compound layer on the surface with a thickness of less than one manolayer. The compound layer is then oxidized by exposing the compound layer to essentially oxygen at a low partial pressure and low temperature. The method may further comprise the step of annealing the surface while under a vacuum to further stabilize the oxidized film structure. A crystalline metal oxide structure may be subsequently epitaxially grown by using the oxidized film structure as an interfacial template and depositing on the interfacial template at least one layer of a crystalline metal oxide.</p>
申请公布号 WO2002059945(A2) 申请公布日期 2002.08.01
申请号 US2002002981 申请日期 2002.01.22
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