发明名称 Solar cell and method of manufacturing same
摘要 A face side of the semiconductor crystal substrate is brought into contact with an electrolytic liquid containing a fluoride, and an electrode is disposed in the electrolytic liquid. A current is produced between the electrode and the semiconductor crystal substrate and applying light to a reverse side of the semiconductor crystal substrate to generate pairs of holes and electrons. The semiconductor crystal substrate is etched by combining the holes with ions in the electrolytic liquid thereby to form a multiplicity of through-holes in the semiconductor crystal substrate.
申请公布号 US2002102766(A1) 申请公布日期 2002.08.01
申请号 US20020053601 申请日期 2002.01.24
申请人 SHIBATA AKIO;EMOTO MAKIKO;YOKOTA HIROSHI 发明人 SHIBATA AKIO;EMOTO MAKIKO;YOKOTA HIROSHI
分类号 H01L21/00;H01L21/02;H01L21/3063;H01L21/465;H01L27/142;H01L31/028;H01L31/0352;H01L31/04;H01L31/042;H01L31/18;(IPC1-7):H01L21/00 主分类号 H01L21/00
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