| 摘要 |
<p>A single wafer transfer system for shortening the production time and reducing the required space. Twenty five wafers contained in a cassette are taken out simultaneously by means of a batch robot and placed in a temporary box. A single wafer robot takes out the wafer sheet by sheet from the temporary box and transfers it onto a single wafer conveyor traveling continuously while reading out a wafer number. A single wafer robot on the production apparatus side scoops the wafer from the conveyor and transfers it to the production apparatus while reading out a wafer number. When the wafer can not be transferred to the production apparatus, it is placed temporarily in a buffer box. The single wafer robot reads out the number of a machined wafer and transfers it to the single wafer conveyor thus carrying the machined wafer to the next production apparatus. Wafers circulated on the single wafer conveyor and returned back to the original position are contained in the cassette in reverse order and fed to the next process.</p> |
