Semiconductor device production management system, and semiconductor device production method

摘要

A cassette usage rule processing function 66 is used to store usage rules on cassettes for containing wafers. A process flow creation function 72 permits creation of reviewable process flows. A process flow check function 74 provides checks on whether the reviewable process flows comply with the cassette usage rules, and supplies only the conforming process flows to a production line. In each process, a processing condition display function 82 displays the applicable cassette usage rules for review by a line operator. If cassettes need to be changed before or after a process, a process start function 84 or a process end function 86 prompts the line operator to change the cassettes.