| 摘要 |
A molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, and a resonator for generating an output beam. The resonator includes at least one wavelength selection optic for selecting a primary line among multiple characteristic photoemission lines around 157 nm including suppressing a secondary line among the plurality of characteristic photoemission lines around 157 nm to below 1%. The resonator further includes at least one polarizing optic for polarizing the selected line so that the output beam has a polarization of at least substantially 95%, and preferably 97.5% or more.
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