Method of producing bis (cyclopentadienyl) ruthenium derivative, bis (cyclopentadienyl) ruthenium derivative produced by the same method, and method of producing thin film of ruthenium or ruthenium compound

摘要

There is provided a method of producing a bis(cyclopentadienyl) ruthenium derivative, in which bis (cyclopentadienyl) ruthenium is first made monoanionized or dianionized with an anionizing agent, and then reacted with an electrophilic agent. It is preferable to use the anionizing agent selected from the group consisting of lithium, sodium, potassium, calcium, alkyl lithium, alkyl sodium, alkyl potassium, Grignard reagent and lithium aluminum hydride, and electrophilic agent selected from the group consisting of alkyl, alkenyl and alkynyl halides, aldehydes, and ketones.