| 摘要 |
The present invention provides a thin film coil with low resistance and low inductance, and a method of forming the thin film coil, and a thin film magnetic head, a thin film inductor and a thin film magnetic sensor each using the thin film coil. In the thin film coil, at least the side surfaces of the conductor of a first coil are completely coated with an insulating film, and the conductor of a second coil is formed on a substrate with the insulating film provided therebetween. The thin film coil is formed by forming a plating underlying film on the substrate, forming the conductor of the first coil, etching off the plating underlying film except the portion below the conductor, forming the insulating film over the entire surface, forming a second plating underlying film on the insulating film, forming the conductor of the second coil by plating on the portion of the second plating film 16, which corresponds to the pitch interval of the first coil, and removing the second plating underlying film on the insulating film of the first coil.
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