Integrated mask and method and apparatus for manufacturing organic EL device using the same

摘要

An integrated mask including a plurality of deposition masks, each deposition mask having an array of deposition apertures formed in accordance with a deposition pattern; and a base plate having a plurality of openings on which the deposition masks are arranged is provided. The deposition mass are retained to the base plate by engaging unit in a disengageable manner, and alignment marks used for positioning the deposition masks on the base plate are formed on the base plate. In addition a method and apparatus for fabricating the intergrated mask, a method and apparatus for manufacturing an organic EL device using the integrated mask, and an organic EL device are provided.