| 摘要 |
PURPOSE: To rapidly and accurately detect the position of a product without using an absolute grid or a proof sample when the product is manufactured. CONSTITUTION: A lead is allocated one by one at the center in the field of vision of a camera and photographed separately, and then the coordinates of position (Lax, Lay) of the lead are obtained (S104). All the leads positioned in the field of vision are photographed en block, and the coordinates of position (Lbx, Lby) of each lead are obtained (S106). The values of difference between the former and the latter are memorized as calibration values: (Ldx, Ldy)=(Lax -Lbx, Lay - Lby) (S108). The calibration values (Ldx, Ldy) are added to the coordinates of position of each lead obtained by wholly photographing a semiconductor device that is an object to be detected when the product is manufactured. The photographing time is shortened by wholly photographing, and errors caused by the distortion of an optical system and the directivity of illumination are eliminated by the calibration values (Ldx, Ldy). |
