RADIATION SENSITIVE POSITIVE TYPE RESIST COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a chemical amplification type radiation sensitive positive type resist composition excellent in various functions such as resolving power. SOLUTION: The radiation sensitive positive type resist composition contains a resin having a rate of dissolution in an alkali developing solution increased by the action of an acid, a compound which generates the acid when irradiated with active light or radiation, a solvent and a compound having a bond which is cleaved by irradiation with the active light or radiation to generate a basic compound and an ionic compound.