RADIATION SENSITIVE POSITIVE TYPE RESIST COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a radiation sensitive positive type resist composition excellent in various functions such as DOF(degree of freedom) of focus and resolving power and excellent also in shelf stability. SOLUTION: The radiation sensitive positive type resist composition contains a resin having a rate of dissolution in an alkali developing solution increased by the action of an acid, a compound which generates the acid when irradiated with active light or radiation, a solvent and a compound having a bond which is cleaved under heat to separate two or more components including a radical species and/or an ionic compound.