| 摘要 |
PROBLEM TO BE SOLVED: To provide a Cr alloy target material which exhibits little local melting, stable discharge characteristics and a prolonged life, and to provide a production method therefor and a film coating method by the utilization of these techniques. SOLUTION: A Cr alloy target material is presented where, by area, a <=5% pure Si phase and a <=40% intermetallic compound phase formed of target material constituting elements are present in the target material structure. As a concrete example, a <=5% pure Si phase, a <=40% intermetallic compound phase formed of target material constituting elements, and the balance consisting substantially of a solid solution phase formed of target material constituting elements are present. Preferably, the material has a composition containing, by atom, 1 to 40% Si and the balance substantially Cr. The addition of 1 to 7% B is also effective. The target material is preferable for arc ion plating, and is used, e.g. for surface coating of sliding parts, cutting tools and dies.
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